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Precursors
Semiconductor Targets
FPD and Solar Targets
Chemical Precursors
OLED
Terms and Conditions

 

In North America and Europe, and through our subsidiaries of TSMD Taiwan and TSMD Korea, Tosoh SMD is the sales representative for chemical Precursor and OLED materials developed by Tosoh Corporation for advanced semiconductor and display applications.  Tosoh Corporation has developed chemical Precursors to provide important process, film, and cost of ownership advantages.  

 

 

 

 

 

 

DER

(2,4-Dimethylpentadienyl)(Ethylcyclopentadienyl)Ruthenium

  One such material developed by Tosoh Corporation and now being evaluated by customers is Ru precursor, DER. The structure of DER is unique which provides properties that are advantageous compared to competitor’s Ru precursors.

 

The DER structure provides short incubation time for deposition and a lower effective deposition temperature. Dense film nucleation, smooth film morphology, and excellent step coverage are achieved using the DER. Contact us for additional information.

 

For mor information on our precursor offerings, contact us.

 

Tosoh SMD, Inc  3600 Gantz Road, Grove City, OH 43123  Tel: (614) 875-7912  Email: info.tsmd@tosoh.com