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Tcursor® series: Ts-Al4 for Al2O3

 Characteristics
  • Melting point: <-15°C
  • Vapor pressure: 0.1Torr (44°C)
  • Non-pyrophoric
  • Liquid at room temperature
  • Much higher vapor pressure than TDEAA

Thermal Properties

  

12.-Ts-Al4-1.JPG

Thermal CVD with O2

  

12.-Ts-Al4-2.JPG